复旦微纳传感器课题组
  • Home
  • News
  • Professor Lu
  • Research
  • Publication
  • People
  • Activities
  • Equipments
  • Contact
Atomic Layer Deposition (ALD) shut down Back to previous  
Semiconductor Materials and Devices
Sensors and MEMS Devices
IC Design
            
Preparation of AlON film based on one step method with PEALD technique
Address: State Key Laboratory of ASIC and System, Fudan University, 220 Handan Road, Shanghai 200433, China
E-mail: honglianglu@fudan.edu.cn
 
All Rights Reserved.
  • 客服电话