DMD maskless lithography technology：
The method of exposure and imaging is basically similar to that of traditional projection. The difference lies in the use of digital DMD (Digital Micromirror Device) instead of traditional masks. The main principle is to input the required lithography pattern into the DMD chip through software of the computer. the rotation angle of the DMD chip micromirror can be changed according to the distribution of black and white pixels in the image . and large-area microstructure preparation can be realized by controlling the movement of the sample stage. The schematic diagram of the device is shown on the right.
The method of exposure and imaging is basically similar to that of traditional projection. The difference lies in the use of digital DMD (Digital Micromirror Device) instead of traditional masks. The main principle is to input the required lithography pattern into the DMD chip through software of the computer. the rotation angle of the DMD chip micromirror can be changed according to the distribution of black and white pixels in the image . and large-area microstructure preparation can be realized by controlling the movement of the sample stage. The schematic diagram of the device is shown on the right.
Advantages of DMD lithography:
1. low cost
2. high flexibility
3. high productivity
Research topic：
Preparation of microstructure arrays and equal cross-section spirals
Preparation of wearable devices
Preparation of wearable devices